Quickly detect almost all elements on the periodic table simultaneously

Lowest detection limit (down to ppq level)

Analyze the best benefit/cost ratio

The widest linear dynamic range - direct detection of concentrations from ppq to hundreds of ppm

The spectrum is the simplest, the interference is the smallest, the accuracy and precision are good.

The sample volume is very low (ul to ml), and the analysis speed is very fast (1~3minutes/sample)

Flexible detection mode

Analysis of ultra-trace pollutants in materials commonly used in the semiconductor industry:

Solid:Si; GaAa single crystal section; quartz, silicon carbide and other furnace materials; high purity metal electrodes, etc.

Liquid:ultrapure water; HF; HNO3; HCI; H2SO4; H2O2;